JPH0734928Y2 - 処理物保持装置 - Google Patents

処理物保持装置

Info

Publication number
JPH0734928Y2
JPH0734928Y2 JP1988095496U JP9549688U JPH0734928Y2 JP H0734928 Y2 JPH0734928 Y2 JP H0734928Y2 JP 1988095496 U JP1988095496 U JP 1988095496U JP 9549688 U JP9549688 U JP 9549688U JP H0734928 Y2 JPH0734928 Y2 JP H0734928Y2
Authority
JP
Japan
Prior art keywords
rotation
arm
jig
rotation axis
revolving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988095496U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217553U (en]
Inventor
邦治 田上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1988095496U priority Critical patent/JPH0734928Y2/ja
Publication of JPH0217553U publication Critical patent/JPH0217553U/ja
Application granted granted Critical
Publication of JPH0734928Y2 publication Critical patent/JPH0734928Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1988095496U 1988-07-19 1988-07-19 処理物保持装置 Expired - Lifetime JPH0734928Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988095496U JPH0734928Y2 (ja) 1988-07-19 1988-07-19 処理物保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988095496U JPH0734928Y2 (ja) 1988-07-19 1988-07-19 処理物保持装置

Publications (2)

Publication Number Publication Date
JPH0217553U JPH0217553U (en]) 1990-02-05
JPH0734928Y2 true JPH0734928Y2 (ja) 1995-08-09

Family

ID=31320164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988095496U Expired - Lifetime JPH0734928Y2 (ja) 1988-07-19 1988-07-19 処理物保持装置

Country Status (1)

Country Link
JP (1) JPH0734928Y2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019210135A1 (en) * 2018-04-28 2019-10-31 Applied Materials, Inc. In-situ wafer rotation for carousel processing chambers
US11482436B2 (en) * 2018-01-10 2022-10-25 Lam Research Corporation Rotational indexer with additional rotational axes

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005290425A (ja) * 2004-03-31 2005-10-20 Tdk Corp スパッタ蒸着装置における基板の回転機構
CN112964277B (zh) * 2021-03-05 2023-05-30 中国电子科技集团公司第四十八研究所 一种石英谐振子修平设备的多工位工件台

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4485759A (en) * 1983-01-19 1984-12-04 Multi-Arc Vacuum Systems Inc. Planetary substrate support apparatus for vapor vacuum deposition coating

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11482436B2 (en) * 2018-01-10 2022-10-25 Lam Research Corporation Rotational indexer with additional rotational axes
US11699610B2 (en) 2018-01-10 2023-07-11 Lam Research Corporation Rotational indexer with additional rotational axes
WO2019210135A1 (en) * 2018-04-28 2019-10-31 Applied Materials, Inc. In-situ wafer rotation for carousel processing chambers
US11798825B2 (en) 2018-04-28 2023-10-24 Applied Materials, Inc. In-situ wafer rotation for carousel processing chambers

Also Published As

Publication number Publication date
JPH0217553U (en]) 1990-02-05

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